JPS50111198A - - Google Patents
Info
- Publication number
- JPS50111198A JPS50111198A JP1158774A JP1158774A JPS50111198A JP S50111198 A JPS50111198 A JP S50111198A JP 1158774 A JP1158774 A JP 1158774A JP 1158774 A JP1158774 A JP 1158774A JP S50111198 A JPS50111198 A JP S50111198A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Silicon Polymers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1158774A JPS53998B2 (ro) | 1974-01-28 | 1974-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1158774A JPS53998B2 (ro) | 1974-01-28 | 1974-01-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50111198A true JPS50111198A (ro) | 1975-09-01 |
| JPS53998B2 JPS53998B2 (ro) | 1978-01-13 |
Family
ID=11782023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1158774A Expired JPS53998B2 (ro) | 1974-01-28 | 1974-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53998B2 (ro) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5388099A (en) * | 1977-01-14 | 1978-08-03 | Japan Synthetic Rubber Co Ltd | Methylpolysiloxane |
| JPS5550645A (en) * | 1978-10-06 | 1980-04-12 | Hitachi Ltd | Semiconductor device |
| US5565540A (en) * | 1992-07-29 | 1996-10-15 | Dow Corning Toray Silicon Co., Ltd. | Method for the preparation of SiOH-containing organosiloxane oligomer |
| US7108771B2 (en) | 2001-12-13 | 2006-09-19 | Advanced Technology Materials, Inc. | Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films |
| US7342295B2 (en) | 2002-11-21 | 2008-03-11 | Advanced Technology Materials, Inc. | Porogen material |
| US7423166B2 (en) | 2001-12-13 | 2008-09-09 | Advanced Technology Materials, Inc. | Stabilized cyclosiloxanes for use as CVD precursors for low-dielectric constant thin films |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02222637A (ja) * | 1989-02-23 | 1990-09-05 | Colpo Co Ltd | 活魚収納用水槽及びケース収納容器 |
| JP2634288B2 (ja) * | 1990-04-11 | 1997-07-23 | 三菱重工業株式会社 | 水生動物収容容器 |
-
1974
- 1974-01-28 JP JP1158774A patent/JPS53998B2/ja not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5388099A (en) * | 1977-01-14 | 1978-08-03 | Japan Synthetic Rubber Co Ltd | Methylpolysiloxane |
| JPS6017214B2 (ja) * | 1977-01-14 | 1985-05-01 | ジェイエスアール株式会社 | 可溶性メチルポリシロキサンおよびその製造法 |
| JPS5550645A (en) * | 1978-10-06 | 1980-04-12 | Hitachi Ltd | Semiconductor device |
| JPS6058592B2 (ja) * | 1978-10-06 | 1985-12-20 | 株式会社日立製作所 | 半導体装置 |
| US5565540A (en) * | 1992-07-29 | 1996-10-15 | Dow Corning Toray Silicon Co., Ltd. | Method for the preparation of SiOH-containing organosiloxane oligomer |
| US7108771B2 (en) | 2001-12-13 | 2006-09-19 | Advanced Technology Materials, Inc. | Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films |
| US7423166B2 (en) | 2001-12-13 | 2008-09-09 | Advanced Technology Materials, Inc. | Stabilized cyclosiloxanes for use as CVD precursors for low-dielectric constant thin films |
| US7342295B2 (en) | 2002-11-21 | 2008-03-11 | Advanced Technology Materials, Inc. | Porogen material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53998B2 (ro) | 1978-01-13 |