JPS50110769A - - Google Patents

Info

Publication number
JPS50110769A
JPS50110769A JP1585174A JP1585174A JPS50110769A JP S50110769 A JPS50110769 A JP S50110769A JP 1585174 A JP1585174 A JP 1585174A JP 1585174 A JP1585174 A JP 1585174A JP S50110769 A JPS50110769 A JP S50110769A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1585174A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1585174A priority Critical patent/JPS50110769A/ja
Publication of JPS50110769A publication Critical patent/JPS50110769A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1585174A 1974-02-09 1974-02-09 Pending JPS50110769A (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1585174A JPS50110769A (xx) 1974-02-09 1974-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1585174A JPS50110769A (xx) 1974-02-09 1974-02-09

Publications (1)

Publication Number Publication Date
JPS50110769A true JPS50110769A (xx) 1975-09-01

Family

ID=11900309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1585174A Pending JPS50110769A (xx) 1974-02-09 1974-02-09

Country Status (1)

Country Link
JP (1) JPS50110769A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169999A (ja) * 1983-03-17 1984-09-26 Matsushita Electric Ind Co Ltd エピタキシヤル層の気相成長方法
JPH0855803A (ja) * 1994-07-28 1996-02-27 Applied Materials Inc 薄膜製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532249Y1 (xx) * 1967-12-28 1970-12-10
JPS4844831A (xx) * 1971-10-08 1973-06-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532249Y1 (xx) * 1967-12-28 1970-12-10
JPS4844831A (xx) * 1971-10-08 1973-06-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169999A (ja) * 1983-03-17 1984-09-26 Matsushita Electric Ind Co Ltd エピタキシヤル層の気相成長方法
JPH0855803A (ja) * 1994-07-28 1996-02-27 Applied Materials Inc 薄膜製造方法

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