JPS50109126A - - Google Patents
Info
- Publication number
- JPS50109126A JPS50109126A JP1512074A JP1512074A JPS50109126A JP S50109126 A JPS50109126 A JP S50109126A JP 1512074 A JP1512074 A JP 1512074A JP 1512074 A JP1512074 A JP 1512074A JP S50109126 A JPS50109126 A JP S50109126A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1512074A JPS50109126A (de) | 1974-02-06 | 1974-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1512074A JPS50109126A (de) | 1974-02-06 | 1974-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50109126A true JPS50109126A (de) | 1975-08-28 |
Family
ID=11879951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1512074A Pending JPS50109126A (de) | 1974-02-06 | 1974-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50109126A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10100428A1 (de) * | 2001-01-08 | 2002-07-18 | Steag Hamatech Ag | Verfahren und Vorrichtung zum Kühlen von Substraten |
-
1974
- 1974-02-06 JP JP1512074A patent/JPS50109126A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10100428A1 (de) * | 2001-01-08 | 2002-07-18 | Steag Hamatech Ag | Verfahren und Vorrichtung zum Kühlen von Substraten |