JPS50108359U - - Google Patents

Info

Publication number
JPS50108359U
JPS50108359U JP1749874U JP1749874U JPS50108359U JP S50108359 U JPS50108359 U JP S50108359U JP 1749874 U JP1749874 U JP 1749874U JP 1749874 U JP1749874 U JP 1749874U JP S50108359 U JPS50108359 U JP S50108359U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1749874U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1749874U priority Critical patent/JPS50108359U/ja
Publication of JPS50108359U publication Critical patent/JPS50108359U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1749874U 1974-02-12 1974-02-12 Pending JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1749874U JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-12 1974-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1749874U JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-12 1974-02-12

Publications (1)

Publication Number Publication Date
JPS50108359U true JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-09-04

Family

ID=28101743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1749874U Pending JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-12 1974-02-12

Country Status (1)

Country Link
JP (1) JPS50108359U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027692A (ja) * 1983-07-25 1985-02-12 Ulvac Corp インプロセスモニタ可能な気相エピタキシヤル成長用化学反応装置
JPH10209052A (ja) * 1997-01-17 1998-08-07 Sony Corp 気相成長装置および気相成長方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027692A (ja) * 1983-07-25 1985-02-12 Ulvac Corp インプロセスモニタ可能な気相エピタキシヤル成長用化学反応装置
JPH10209052A (ja) * 1997-01-17 1998-08-07 Sony Corp 気相成長装置および気相成長方法

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