JPS50106378A - - Google Patents
Info
- Publication number
- JPS50106378A JPS50106378A JP1177874A JP1177874A JPS50106378A JP S50106378 A JPS50106378 A JP S50106378A JP 1177874 A JP1177874 A JP 1177874A JP 1177874 A JP1177874 A JP 1177874A JP S50106378 A JPS50106378 A JP S50106378A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1177874A JPS50106378A (enExample) | 1974-01-30 | 1974-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1177874A JPS50106378A (enExample) | 1974-01-30 | 1974-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50106378A true JPS50106378A (enExample) | 1975-08-21 |
Family
ID=11787400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1177874A Pending JPS50106378A (enExample) | 1974-01-30 | 1974-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50106378A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133664U (ja) * | 1983-02-24 | 1984-09-07 | 株式会社徳田製作所 | スパツタリング装置 |
-
1974
- 1974-01-30 JP JP1177874A patent/JPS50106378A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59133664U (ja) * | 1983-02-24 | 1984-09-07 | 株式会社徳田製作所 | スパツタリング装置 |