JPS50105383A - - Google Patents
Info
- Publication number
- JPS50105383A JPS50105383A JP990275A JP990275A JPS50105383A JP S50105383 A JPS50105383 A JP S50105383A JP 990275 A JP990275 A JP 990275A JP 990275 A JP990275 A JP 990275A JP S50105383 A JPS50105383 A JP S50105383A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7402572A FR2259383B1 (de) | 1974-01-25 | 1974-01-25 | |
| FR7402572 | 1974-01-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50105383A true JPS50105383A (de) | 1975-08-20 |
| JPS6022496B2 JPS6022496B2 (ja) | 1985-06-03 |
Family
ID=9134012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP990275A Expired JPS6022496B2 (ja) | 1974-01-25 | 1975-01-24 | 粒子形光学装置を較正する方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS6022496B2 (de) |
| DE (1) | DE2502720C2 (de) |
| FR (1) | FR2259383B1 (de) |
| GB (1) | GB1497432A (de) |
-
1974
- 1974-01-25 FR FR7402572A patent/FR2259383B1/fr not_active Expired
-
1975
- 1975-01-23 DE DE19752502720 patent/DE2502720C2/de not_active Expired
- 1975-01-24 JP JP990275A patent/JPS6022496B2/ja not_active Expired
- 1975-01-24 GB GB329475A patent/GB1497432A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2502720A1 (de) | 1975-07-31 |
| JPS6022496B2 (ja) | 1985-06-03 |
| FR2259383A1 (de) | 1975-08-22 |
| DE2502720C2 (de) | 1986-05-28 |
| GB1497432A (en) | 1978-01-12 |
| FR2259383B1 (de) | 1977-06-24 |