JPS50102583A - - Google Patents

Info

Publication number
JPS50102583A
JPS50102583A JP808274A JP808274A JPS50102583A JP S50102583 A JPS50102583 A JP S50102583A JP 808274 A JP808274 A JP 808274A JP 808274 A JP808274 A JP 808274A JP S50102583 A JPS50102583 A JP S50102583A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP808274A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP808274A priority Critical patent/JPS50102583A/ja
Publication of JPS50102583A publication Critical patent/JPS50102583A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP808274A 1974-01-17 1974-01-17 Pending JPS50102583A (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP808274A JPS50102583A (en:Method) 1974-01-17 1974-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP808274A JPS50102583A (en:Method) 1974-01-17 1974-01-17

Publications (1)

Publication Number Publication Date
JPS50102583A true JPS50102583A (en:Method) 1975-08-13

Family

ID=11683399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP808274A Pending JPS50102583A (en:Method) 1974-01-17 1974-01-17

Country Status (1)

Country Link
JP (1) JPS50102583A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149876A (en) * 1977-06-03 1978-12-27 Ulvac Corp Depositing apparatus by vacuum evaporation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149876A (en) * 1977-06-03 1978-12-27 Ulvac Corp Depositing apparatus by vacuum evaporation

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