JPS5010232A - - Google Patents
Info
- Publication number
- JPS5010232A JPS5010232A JP6151673A JP6151673A JPS5010232A JP S5010232 A JPS5010232 A JP S5010232A JP 6151673 A JP6151673 A JP 6151673A JP 6151673 A JP6151673 A JP 6151673A JP S5010232 A JPS5010232 A JP S5010232A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6151673A JPS5010232A (fr) | 1973-06-01 | 1973-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6151673A JPS5010232A (fr) | 1973-06-01 | 1973-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5010232A true JPS5010232A (fr) | 1975-02-01 |
Family
ID=13173315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6151673A Pending JPS5010232A (fr) | 1973-06-01 | 1973-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5010232A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616285A (ja) * | 1984-03-06 | 1986-01-11 | ア−エスエム フイコ ツ−リング ベスロ−テン フエン ノ−トチヤツプ | 逆スパツタリングによつて型を浄化する方法及び装置 |
-
1973
- 1973-06-01 JP JP6151673A patent/JPS5010232A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS616285A (ja) * | 1984-03-06 | 1986-01-11 | ア−エスエム フイコ ツ−リング ベスロ−テン フエン ノ−トチヤツプ | 逆スパツタリングによつて型を浄化する方法及び装置 |