JPS4998964A - - Google Patents
Info
- Publication number
- JPS4998964A JPS4998964A JP1008573A JP1008573A JPS4998964A JP S4998964 A JPS4998964 A JP S4998964A JP 1008573 A JP1008573 A JP 1008573A JP 1008573 A JP1008573 A JP 1008573A JP S4998964 A JPS4998964 A JP S4998964A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1008573A JPS5615137B2 (OSRAM) | 1973-01-24 | 1973-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1008573A JPS5615137B2 (OSRAM) | 1973-01-24 | 1973-01-24 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57002959A Division JPS57202743A (en) | 1982-01-11 | 1982-01-11 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4998964A true JPS4998964A (OSRAM) | 1974-09-19 |
| JPS5615137B2 JPS5615137B2 (OSRAM) | 1981-04-08 |
Family
ID=11740489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1008573A Expired JPS5615137B2 (OSRAM) | 1973-01-24 | 1973-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5615137B2 (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53121466A (en) * | 1977-03-31 | 1978-10-23 | Toshiba Corp | Manufacture for semiconductor device |
| JPS58176930A (ja) * | 1982-04-12 | 1983-10-17 | Yukio Yasuda | 半導体装置の製造方法 |
| JPH0837183A (ja) * | 1995-01-19 | 1996-02-06 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| US7479939B1 (en) | 1991-02-16 | 2009-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3328210A (en) * | 1964-10-26 | 1967-06-27 | North American Aviation Inc | Method of treating semiconductor device by ionic bombardment |
-
1973
- 1973-01-24 JP JP1008573A patent/JPS5615137B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3328210A (en) * | 1964-10-26 | 1967-06-27 | North American Aviation Inc | Method of treating semiconductor device by ionic bombardment |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53121466A (en) * | 1977-03-31 | 1978-10-23 | Toshiba Corp | Manufacture for semiconductor device |
| JPS58176930A (ja) * | 1982-04-12 | 1983-10-17 | Yukio Yasuda | 半導体装置の製造方法 |
| US7479939B1 (en) | 1991-02-16 | 2009-01-20 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device |
| JPH0837183A (ja) * | 1995-01-19 | 1996-02-06 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5615137B2 (OSRAM) | 1981-04-08 |