JPS4997573A - - Google Patents

Info

Publication number
JPS4997573A
JPS4997573A JP48124105A JP12410573A JPS4997573A JP S4997573 A JPS4997573 A JP S4997573A JP 48124105 A JP48124105 A JP 48124105A JP 12410573 A JP12410573 A JP 12410573A JP S4997573 A JPS4997573 A JP S4997573A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48124105A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4997573A publication Critical patent/JPS4997573A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP48124105A 1972-12-14 1973-11-06 Pending JPS4997573A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31526472A 1972-12-14 1972-12-14

Publications (1)

Publication Number Publication Date
JPS4997573A true JPS4997573A (ja) 1974-09-14

Family

ID=23223612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48124105A Pending JPS4997573A (ja) 1972-12-14 1973-11-06

Country Status (5)

Country Link
US (1) US3777260A (ja)
JP (1) JPS4997573A (ja)
DE (1) DE2359149A1 (ja)
FR (1) FR2210767B1 (ja)
GB (1) GB1394768A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63258036A (ja) * 1987-04-15 1988-10-25 Tokyo Electron Ltd ウエハ載置台

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052793A (en) * 1976-10-04 1977-10-11 International Business Machines Corporation Method of obtaining proper probe alignment in a multiple contact environment
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5397996A (en) * 1993-03-01 1995-03-14 Keezer; David A. Continuity tester using a brush tipped probe
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US5838161A (en) * 1996-05-01 1998-11-17 Micron Technology, Inc. Semiconductor interconnect having test structures for evaluating electrical characteristics of the interconnect
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6836135B2 (en) 2001-08-31 2004-12-28 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7176705B2 (en) 2004-06-07 2007-02-13 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US8645149B2 (en) * 2006-01-23 2014-02-04 Balboa Water Group, Inc. Testing method and system
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3308378A (en) * 1963-10-23 1967-03-07 Peter J Murray Program card controlled switch apparatus for testing transistors and the like
US3493858A (en) * 1966-01-14 1970-02-03 Ibm Inflatable probe apparatus for uniformly contacting and testing microcircuits
US3453545A (en) * 1967-07-07 1969-07-01 Rca Corp Probe assembly for testing semiconductor wafers including a wafer vibrator for effecting good test connections

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63258036A (ja) * 1987-04-15 1988-10-25 Tokyo Electron Ltd ウエハ載置台

Also Published As

Publication number Publication date
FR2210767A1 (ja) 1974-07-12
DE2359149A1 (de) 1974-06-20
US3777260A (en) 1973-12-04
GB1394768A (en) 1975-05-21
FR2210767B1 (ja) 1978-12-08

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