JPS4996673A - - Google Patents
Info
- Publication number
- JPS4996673A JPS4996673A JP721973A JP721973A JPS4996673A JP S4996673 A JPS4996673 A JP S4996673A JP 721973 A JP721973 A JP 721973A JP 721973 A JP721973 A JP 721973A JP S4996673 A JPS4996673 A JP S4996673A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP721973A JPS5317389B2 (ja) | 1973-01-16 | 1973-01-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP721973A JPS5317389B2 (ja) | 1973-01-16 | 1973-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4996673A true JPS4996673A (ja) | 1974-09-12 |
| JPS5317389B2 JPS5317389B2 (ja) | 1978-06-08 |
Family
ID=11659873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP721973A Expired JPS5317389B2 (ja) | 1973-01-16 | 1973-01-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5317389B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62166529A (ja) * | 1986-01-20 | 1987-07-23 | Nec Corp | 薄膜の形成方法 |
| JPH01216544A (ja) * | 1988-02-24 | 1989-08-30 | Sharp Corp | 半導体素子のパッシベーション膜形成方法 |
-
1973
- 1973-01-16 JP JP721973A patent/JPS5317389B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62166529A (ja) * | 1986-01-20 | 1987-07-23 | Nec Corp | 薄膜の形成方法 |
| JPH01216544A (ja) * | 1988-02-24 | 1989-08-30 | Sharp Corp | 半導体素子のパッシベーション膜形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5317389B2 (ja) | 1978-06-08 |