JPS499523B1 - - Google Patents
Info
- Publication number
- JPS499523B1 JPS499523B1 JP4208671A JP4208671A JPS499523B1 JP S499523 B1 JPS499523 B1 JP S499523B1 JP 4208671 A JP4208671 A JP 4208671A JP 4208671 A JP4208671 A JP 4208671A JP S499523 B1 JPS499523 B1 JP S499523B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208671A JPS499523B1 (zh) | 1971-06-11 | 1971-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208671A JPS499523B1 (zh) | 1971-06-11 | 1971-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS499523B1 true JPS499523B1 (zh) | 1974-03-05 |
Family
ID=12626208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4208671A Pending JPS499523B1 (zh) | 1971-06-11 | 1971-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS499523B1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693862B (zh) * | 2017-06-27 | 2020-05-11 | 日商佳能安內華股份有限公司 | 電漿處理裝置 |
-
1971
- 1971-06-11 JP JP4208671A patent/JPS499523B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI693862B (zh) * | 2017-06-27 | 2020-05-11 | 日商佳能安內華股份有限公司 | 電漿處理裝置 |