JPS499441A - - Google Patents
Info
- Publication number
- JPS499441A JPS499441A JP47052642A JP5264272A JPS499441A JP S499441 A JPS499441 A JP S499441A JP 47052642 A JP47052642 A JP 47052642A JP 5264272 A JP5264272 A JP 5264272A JP S499441 A JPS499441 A JP S499441A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5264272A JPS533652B2 (en:Method) | 1972-05-27 | 1972-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5264272A JPS533652B2 (en:Method) | 1972-05-27 | 1972-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS499441A true JPS499441A (en:Method) | 1974-01-28 |
| JPS533652B2 JPS533652B2 (en:Method) | 1978-02-08 |
Family
ID=12920476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5264272A Expired JPS533652B2 (en:Method) | 1972-05-27 | 1972-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS533652B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014186140A (ja) * | 2013-03-22 | 2014-10-02 | Nippon Soken Inc | パターン形成方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5513011U (en:Method) * | 1978-07-11 | 1980-01-28 | ||
| JPS55134278U (en:Method) * | 1979-03-15 | 1980-09-24 |
-
1972
- 1972-05-27 JP JP5264272A patent/JPS533652B2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| SAKURA GRAPHIC ARTS MATERIALS=1971 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014186140A (ja) * | 2013-03-22 | 2014-10-02 | Nippon Soken Inc | パターン形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS533652B2 (en:Method) | 1978-02-08 |