JPS499441A - - Google Patents

Info

Publication number
JPS499441A
JPS499441A JP47052642A JP5264272A JPS499441A JP S499441 A JPS499441 A JP S499441A JP 47052642 A JP47052642 A JP 47052642A JP 5264272 A JP5264272 A JP 5264272A JP S499441 A JPS499441 A JP S499441A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47052642A
Other languages
Japanese (ja)
Other versions
JPS533652B2 (Direct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5264272A priority Critical patent/JPS533652B2/ja
Publication of JPS499441A publication Critical patent/JPS499441A/ja
Publication of JPS533652B2 publication Critical patent/JPS533652B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP5264272A 1972-05-27 1972-05-27 Expired JPS533652B2 (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5264272A JPS533652B2 (Direct) 1972-05-27 1972-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5264272A JPS533652B2 (Direct) 1972-05-27 1972-05-27

Publications (2)

Publication Number Publication Date
JPS499441A true JPS499441A (Direct) 1974-01-28
JPS533652B2 JPS533652B2 (Direct) 1978-02-08

Family

ID=12920476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5264272A Expired JPS533652B2 (Direct) 1972-05-27 1972-05-27

Country Status (1)

Country Link
JP (1) JPS533652B2 (Direct)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186140A (ja) * 2013-03-22 2014-10-02 Nippon Soken Inc パターン形成方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513011U (Direct) * 1978-07-11 1980-01-28
JPS55134278U (Direct) * 1979-03-15 1980-09-24

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SAKURA GRAPHIC ARTS MATERIALS=1971 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186140A (ja) * 2013-03-22 2014-10-02 Nippon Soken Inc パターン形成方法

Also Published As

Publication number Publication date
JPS533652B2 (Direct) 1978-02-08

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