JPS4994405U - - Google Patents
Info
- Publication number
- JPS4994405U JPS4994405U JP13979972U JP13979972U JPS4994405U JP S4994405 U JPS4994405 U JP S4994405U JP 13979972 U JP13979972 U JP 13979972U JP 13979972 U JP13979972 U JP 13979972U JP S4994405 U JPS4994405 U JP S4994405U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13979972U JPS5228892Y2 (fr) | 1972-12-04 | 1972-12-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13979972U JPS5228892Y2 (fr) | 1972-12-04 | 1972-12-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4994405U true JPS4994405U (fr) | 1974-08-15 |
JPS5228892Y2 JPS5228892Y2 (fr) | 1977-07-01 |
Family
ID=28416291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13979972U Expired JPS5228892Y2 (fr) | 1972-12-04 | 1972-12-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228892Y2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180018526A (ko) | 2015-06-17 | 2018-02-21 | 호야 가부시키가이샤 | 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법 |
-
1972
- 1972-12-04 JP JP13979972U patent/JPS5228892Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180018526A (ko) | 2015-06-17 | 2018-02-21 | 호야 가부시키가이샤 | 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법 |
KR20240046293A (ko) | 2015-06-17 | 2024-04-08 | 호야 가부시키가이샤 | 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
JPS5228892Y2 (fr) | 1977-07-01 |