JPS4994405U - - Google Patents

Info

Publication number
JPS4994405U
JPS4994405U JP13979972U JP13979972U JPS4994405U JP S4994405 U JPS4994405 U JP S4994405U JP 13979972 U JP13979972 U JP 13979972U JP 13979972 U JP13979972 U JP 13979972U JP S4994405 U JPS4994405 U JP S4994405U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13979972U
Other languages
Japanese (ja)
Other versions
JPS5228892Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13979972U priority Critical patent/JPS5228892Y2/ja
Publication of JPS4994405U publication Critical patent/JPS4994405U/ja
Application granted granted Critical
Publication of JPS5228892Y2 publication Critical patent/JPS5228892Y2/ja
Expired legal-status Critical Current

Links

JP13979972U 1972-12-04 1972-12-04 Expired JPS5228892Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13979972U JPS5228892Y2 (fr) 1972-12-04 1972-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13979972U JPS5228892Y2 (fr) 1972-12-04 1972-12-04

Publications (2)

Publication Number Publication Date
JPS4994405U true JPS4994405U (fr) 1974-08-15
JPS5228892Y2 JPS5228892Y2 (fr) 1977-07-01

Family

ID=28416291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13979972U Expired JPS5228892Y2 (fr) 1972-12-04 1972-12-04

Country Status (1)

Country Link
JP (1) JPS5228892Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018526A (ko) 2015-06-17 2018-02-21 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018526A (ko) 2015-06-17 2018-02-21 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법
KR20240046293A (ko) 2015-06-17 2024-04-08 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법

Also Published As

Publication number Publication date
JPS5228892Y2 (fr) 1977-07-01

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