JPS4994405U - - Google Patents

Info

Publication number
JPS4994405U
JPS4994405U JP13979972U JP13979972U JPS4994405U JP S4994405 U JPS4994405 U JP S4994405U JP 13979972 U JP13979972 U JP 13979972U JP 13979972 U JP13979972 U JP 13979972U JP S4994405 U JPS4994405 U JP S4994405U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13979972U
Other languages
Japanese (ja)
Other versions
JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13979972U priority Critical patent/JPS5228892Y2/ja
Publication of JPS4994405U publication Critical patent/JPS4994405U/ja
Application granted granted Critical
Publication of JPS5228892Y2 publication Critical patent/JPS5228892Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Building Environments (AREA)
  • Roof Covering Using Slabs Or Stiff Sheets (AREA)
JP13979972U 1972-12-04 1972-12-04 Expired JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13979972U JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-04 1972-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13979972U JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-04 1972-12-04

Publications (2)

Publication Number Publication Date
JPS4994405U true JPS4994405U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-15
JPS5228892Y2 JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-01

Family

ID=28416291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13979972U Expired JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-04 1972-12-04

Country Status (1)

Country Link
JP (1) JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018526A (ko) 2015-06-17 2018-02-21 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180018526A (ko) 2015-06-17 2018-02-21 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법
KR20240046293A (ko) 2015-06-17 2024-04-08 호야 가부시키가이샤 도전막 부착 기판, 다층 반사막 부착 기판, 반사형 마스크 블랭크, 반사형 마스크 및 반도체 장치의 제조 방법

Also Published As

Publication number Publication date
JPS5228892Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-07-01

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