JPS4991774A - - Google Patents
Info
- Publication number
- JPS4991774A JPS4991774A JP48000025A JP2573A JPS4991774A JP S4991774 A JPS4991774 A JP S4991774A JP 48000025 A JP48000025 A JP 48000025A JP 2573 A JP2573 A JP 2573A JP S4991774 A JPS4991774 A JP S4991774A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48000025A JPS4991774A (enExample) | 1973-01-05 | 1973-01-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48000025A JPS4991774A (enExample) | 1973-01-05 | 1973-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4991774A true JPS4991774A (enExample) | 1974-09-02 |
Family
ID=11462836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48000025A Pending JPS4991774A (enExample) | 1973-01-05 | 1973-01-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4991774A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111280A (en) * | 1977-03-10 | 1978-09-28 | Canon Inc | Mask or wafer for production of semiconductor elements and device for aligning these |
-
1973
- 1973-01-05 JP JP48000025A patent/JPS4991774A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53111280A (en) * | 1977-03-10 | 1978-09-28 | Canon Inc | Mask or wafer for production of semiconductor elements and device for aligning these |