JPS4991189A - - Google Patents

Info

Publication number
JPS4991189A
JPS4991189A JP49773A JP49773A JPS4991189A JP S4991189 A JPS4991189 A JP S4991189A JP 49773 A JP49773 A JP 49773A JP 49773 A JP49773 A JP 49773A JP S4991189 A JPS4991189 A JP S4991189A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49773A
Other languages
Japanese (ja)
Other versions
JPS5639052B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP73497A priority Critical patent/JPS5639052B2/ja
Publication of JPS4991189A publication Critical patent/JPS4991189A/ja
Publication of JPS5639052B2 publication Critical patent/JPS5639052B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP73497A 1972-12-29 1972-12-29 Expired JPS5639052B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (cs) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (cs) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991189A true JPS4991189A (cs) 1974-08-30
JPS5639052B2 JPS5639052B2 (cs) 1981-09-10

Family

ID=11475379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73497A Expired JPS5639052B2 (cs) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5639052B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772333A (en) * 1980-10-23 1982-05-06 Fujitsu Ltd Manufacture of semiconductor device
JPS58212137A (ja) * 1982-06-03 1983-12-09 Mitsubishi Electric Corp 半導体素子の製造方法
US4999083A (en) * 1988-10-02 1991-03-12 Canon Kabushiki Kaisha Method of etching crystalline material with etchant injection inlet

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (cs) * 1971-09-15 1973-06-01
JPS4855586A (cs) * 1971-11-13 1973-08-04
JPS4915114A (cs) * 1972-06-02 1974-02-09

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (cs) * 1971-09-15 1973-06-01
JPS4855586A (cs) * 1971-11-13 1973-08-04
JPS4915114A (cs) * 1972-06-02 1974-02-09

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772333A (en) * 1980-10-23 1982-05-06 Fujitsu Ltd Manufacture of semiconductor device
JPS58212137A (ja) * 1982-06-03 1983-12-09 Mitsubishi Electric Corp 半導体素子の製造方法
US4999083A (en) * 1988-10-02 1991-03-12 Canon Kabushiki Kaisha Method of etching crystalline material with etchant injection inlet

Also Published As

Publication number Publication date
JPS5639052B2 (cs) 1981-09-10

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