JPS4991189A - - Google Patents

Info

Publication number
JPS4991189A
JPS4991189A JP49773A JP49773A JPS4991189A JP S4991189 A JPS4991189 A JP S4991189A JP 49773 A JP49773 A JP 49773A JP 49773 A JP49773 A JP 49773A JP S4991189 A JPS4991189 A JP S4991189A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49773A
Other languages
Japanese (ja)
Other versions
JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP73497A priority Critical patent/JPS5639052B2/ja
Publication of JPS4991189A publication Critical patent/JPS4991189A/ja
Publication of JPS5639052B2 publication Critical patent/JPS5639052B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP73497A 1972-12-29 1972-12-29 Expired JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991189A true JPS4991189A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-30
JPS5639052B2 JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-10

Family

ID=11475379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73497A Expired JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772333A (en) * 1980-10-23 1982-05-06 Fujitsu Ltd Manufacture of semiconductor device
JPS58212137A (ja) * 1982-06-03 1983-12-09 Mitsubishi Electric Corp 半導体素子の製造方法
US4999083A (en) * 1988-10-02 1991-03-12 Canon Kabushiki Kaisha Method of etching crystalline material with etchant injection inlet

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-15 1973-06-01
JPS4855586A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-13 1973-08-04
JPS4915114A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-02 1974-02-09

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-09-15 1973-06-01
JPS4855586A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-13 1973-08-04
JPS4915114A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-02 1974-02-09

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772333A (en) * 1980-10-23 1982-05-06 Fujitsu Ltd Manufacture of semiconductor device
JPS58212137A (ja) * 1982-06-03 1983-12-09 Mitsubishi Electric Corp 半導体素子の製造方法
US4999083A (en) * 1988-10-02 1991-03-12 Canon Kabushiki Kaisha Method of etching crystalline material with etchant injection inlet

Also Published As

Publication number Publication date
JPS5639052B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-10

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