JPS4991080A - - Google Patents
Info
- Publication number
- JPS4991080A JPS4991080A JP376973A JP376973A JPS4991080A JP S4991080 A JPS4991080 A JP S4991080A JP 376973 A JP376973 A JP 376973A JP 376973 A JP376973 A JP 376973A JP S4991080 A JPS4991080 A JP S4991080A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP376973A JPS5418235B2 (https=) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP376973A JPS5418235B2 (https=) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4991080A true JPS4991080A (https=) | 1974-08-30 |
| JPS5418235B2 JPS5418235B2 (https=) | 1979-07-05 |
Family
ID=11566363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP376973A Expired JPS5418235B2 (https=) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5418235B2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52135447U (https=) * | 1976-04-09 | 1977-10-14 | ||
| JPS60116771A (ja) * | 1983-11-29 | 1985-06-24 | Ulvac Corp | クラスタイオンビ−ム蒸発源装置 |
| JPS60116772A (ja) * | 1983-11-29 | 1985-06-24 | Ulvac Corp | クラスタイオンビ−ム蒸発源装置 |
| US5253266A (en) * | 1992-07-20 | 1993-10-12 | Intevac, Inc. | MBE effusion source with asymmetrical heaters |
-
1972
- 1972-12-29 JP JP376973A patent/JPS5418235B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52135447U (https=) * | 1976-04-09 | 1977-10-14 | ||
| JPS60116771A (ja) * | 1983-11-29 | 1985-06-24 | Ulvac Corp | クラスタイオンビ−ム蒸発源装置 |
| JPS60116772A (ja) * | 1983-11-29 | 1985-06-24 | Ulvac Corp | クラスタイオンビ−ム蒸発源装置 |
| US5253266A (en) * | 1992-07-20 | 1993-10-12 | Intevac, Inc. | MBE effusion source with asymmetrical heaters |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5418235B2 (https=) | 1979-07-05 |