JPS4991080A - - Google Patents

Info

Publication number
JPS4991080A
JPS4991080A JP376973A JP376973A JPS4991080A JP S4991080 A JPS4991080 A JP S4991080A JP 376973 A JP376973 A JP 376973A JP 376973 A JP376973 A JP 376973A JP S4991080 A JPS4991080 A JP S4991080A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP376973A
Other languages
Japanese (ja)
Other versions
JPS5418235B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP376973A priority Critical patent/JPS5418235B2/ja
Publication of JPS4991080A publication Critical patent/JPS4991080A/ja
Publication of JPS5418235B2 publication Critical patent/JPS5418235B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
JP376973A 1972-12-29 1972-12-29 Expired JPS5418235B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (cs) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (cs) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991080A true JPS4991080A (cs) 1974-08-30
JPS5418235B2 JPS5418235B2 (cs) 1979-07-05

Family

ID=11566363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP376973A Expired JPS5418235B2 (cs) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5418235B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135447U (cs) * 1976-04-09 1977-10-14
JPS60116772A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
JPS60116771A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
US5253266A (en) * 1992-07-20 1993-10-12 Intevac, Inc. MBE effusion source with asymmetrical heaters

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135447U (cs) * 1976-04-09 1977-10-14
JPS60116772A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
JPS60116771A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
US5253266A (en) * 1992-07-20 1993-10-12 Intevac, Inc. MBE effusion source with asymmetrical heaters

Also Published As

Publication number Publication date
JPS5418235B2 (cs) 1979-07-05

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