JPS4991080A - - Google Patents

Info

Publication number
JPS4991080A
JPS4991080A JP376973A JP376973A JPS4991080A JP S4991080 A JPS4991080 A JP S4991080A JP 376973 A JP376973 A JP 376973A JP 376973 A JP376973 A JP 376973A JP S4991080 A JPS4991080 A JP S4991080A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP376973A
Other languages
Japanese (ja)
Other versions
JPS5418235B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP376973A priority Critical patent/JPS5418235B2/ja
Publication of JPS4991080A publication Critical patent/JPS4991080A/ja
Publication of JPS5418235B2 publication Critical patent/JPS5418235B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
JP376973A 1972-12-29 1972-12-29 Expired JPS5418235B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (cg-RX-API-DMAC10.html) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP376973A JPS5418235B2 (cg-RX-API-DMAC10.html) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991080A true JPS4991080A (cg-RX-API-DMAC10.html) 1974-08-30
JPS5418235B2 JPS5418235B2 (cg-RX-API-DMAC10.html) 1979-07-05

Family

ID=11566363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP376973A Expired JPS5418235B2 (cg-RX-API-DMAC10.html) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5418235B2 (cg-RX-API-DMAC10.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135447U (cg-RX-API-DMAC10.html) * 1976-04-09 1977-10-14
JPS60116771A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
JPS60116772A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
US5253266A (en) * 1992-07-20 1993-10-12 Intevac, Inc. MBE effusion source with asymmetrical heaters

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52135447U (cg-RX-API-DMAC10.html) * 1976-04-09 1977-10-14
JPS60116771A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
JPS60116772A (ja) * 1983-11-29 1985-06-24 Ulvac Corp クラスタイオンビ−ム蒸発源装置
US5253266A (en) * 1992-07-20 1993-10-12 Intevac, Inc. MBE effusion source with asymmetrical heaters

Also Published As

Publication number Publication date
JPS5418235B2 (cg-RX-API-DMAC10.html) 1979-07-05

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