JPS4990890A - - Google Patents

Info

Publication number
JPS4990890A
JPS4990890A JP146273A JP146273A JPS4990890A JP S4990890 A JPS4990890 A JP S4990890A JP 146273 A JP146273 A JP 146273A JP 146273 A JP146273 A JP 146273A JP S4990890 A JPS4990890 A JP S4990890A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP146273A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP146273A priority Critical patent/JPS4990890A/ja
Publication of JPS4990890A publication Critical patent/JPS4990890A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP146273A 1972-12-28 1972-12-28 Pending JPS4990890A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP146273A JPS4990890A (fr) 1972-12-28 1972-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP146273A JPS4990890A (fr) 1972-12-28 1972-12-28

Publications (1)

Publication Number Publication Date
JPS4990890A true JPS4990890A (fr) 1974-08-30

Family

ID=11502114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP146273A Pending JPS4990890A (fr) 1972-12-28 1972-12-28

Country Status (1)

Country Link
JP (1) JPS4990890A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100750A (en) * 1980-10-27 1982-06-23 Gen Electric Method and device for implanting through conductor
JPS582059A (ja) * 1981-06-26 1983-01-07 Nec Corp 集積回路
JPS607148A (ja) * 1983-06-24 1985-01-14 Nec Corp 半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100750A (en) * 1980-10-27 1982-06-23 Gen Electric Method and device for implanting through conductor
JPS6339104B2 (fr) * 1980-10-27 1988-08-03 Gen Electric
JPS582059A (ja) * 1981-06-26 1983-01-07 Nec Corp 集積回路
JPS607148A (ja) * 1983-06-24 1985-01-14 Nec Corp 半導体装置の製造方法

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