JPS4990890A - - Google Patents
Info
- Publication number
- JPS4990890A JPS4990890A JP146273A JP146273A JPS4990890A JP S4990890 A JPS4990890 A JP S4990890A JP 146273 A JP146273 A JP 146273A JP 146273 A JP146273 A JP 146273A JP S4990890 A JPS4990890 A JP S4990890A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP146273A JPS4990890A (fr) | 1972-12-28 | 1972-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP146273A JPS4990890A (fr) | 1972-12-28 | 1972-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4990890A true JPS4990890A (fr) | 1974-08-30 |
Family
ID=11502114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP146273A Pending JPS4990890A (fr) | 1972-12-28 | 1972-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4990890A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57100750A (en) * | 1980-10-27 | 1982-06-23 | Gen Electric | Method and device for implanting through conductor |
JPS582059A (ja) * | 1981-06-26 | 1983-01-07 | Nec Corp | 集積回路 |
JPS607148A (ja) * | 1983-06-24 | 1985-01-14 | Nec Corp | 半導体装置の製造方法 |
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1972
- 1972-12-28 JP JP146273A patent/JPS4990890A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57100750A (en) * | 1980-10-27 | 1982-06-23 | Gen Electric | Method and device for implanting through conductor |
JPS6339104B2 (fr) * | 1980-10-27 | 1988-08-03 | Gen Electric | |
JPS582059A (ja) * | 1981-06-26 | 1983-01-07 | Nec Corp | 集積回路 |
JPS607148A (ja) * | 1983-06-24 | 1985-01-14 | Nec Corp | 半導体装置の製造方法 |