JPS4990685A - - Google Patents

Info

Publication number
JPS4990685A
JPS4990685A JP130173A JP130173A JPS4990685A JP S4990685 A JPS4990685 A JP S4990685A JP 130173 A JP130173 A JP 130173A JP 130173 A JP130173 A JP 130173A JP S4990685 A JPS4990685 A JP S4990685A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP130173A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP130173A priority Critical patent/JPS4990685A/ja
Publication of JPS4990685A publication Critical patent/JPS4990685A/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP130173A 1972-12-29 1972-12-29 Pending JPS4990685A (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP130173A JPS4990685A (xx) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP130173A JPS4990685A (xx) 1972-12-29 1972-12-29

Publications (1)

Publication Number Publication Date
JPS4990685A true JPS4990685A (xx) 1974-08-29

Family

ID=11497639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP130173A Pending JPS4990685A (xx) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS4990685A (xx)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037685A (xx) * 1973-08-07 1975-04-08
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
WO1987002026A1 (en) * 1984-05-28 1987-04-09 Shuhara Akira Process for producing silicon dioxide film
JPS637158U (xx) * 1986-06-26 1988-01-18

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037685A (xx) * 1973-08-07 1975-04-08
JPS5232759B2 (xx) * 1973-08-07 1977-08-23
JPS5681671A (en) * 1979-12-04 1981-07-03 Matsushita Electric Ind Co Ltd Ion plating apparatus
JPS622032B2 (xx) * 1979-12-04 1987-01-17 Matsushita Electric Ind Co Ltd
WO1987002026A1 (en) * 1984-05-28 1987-04-09 Shuhara Akira Process for producing silicon dioxide film
JPS637158U (xx) * 1986-06-26 1988-01-18
JPS6350289Y2 (xx) * 1986-06-26 1988-12-23

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