JPS4990284A - - Google Patents

Info

Publication number
JPS4990284A
JPS4990284A JP48001440A JP144073A JPS4990284A JP S4990284 A JPS4990284 A JP S4990284A JP 48001440 A JP48001440 A JP 48001440A JP 144073 A JP144073 A JP 144073A JP S4990284 A JPS4990284 A JP S4990284A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48001440A
Other languages
Japanese (ja)
Other versions
JPS5547109B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP731440A priority Critical patent/JPS5547109B2/ja
Publication of JPS4990284A publication Critical patent/JPS4990284A/ja
Publication of JPS5547109B2 publication Critical patent/JPS5547109B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP731440A 1972-12-28 1972-12-28 Expired JPS5547109B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP731440A JPS5547109B2 (https=) 1972-12-28 1972-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP731440A JPS5547109B2 (https=) 1972-12-28 1972-12-28

Publications (2)

Publication Number Publication Date
JPS4990284A true JPS4990284A (https=) 1974-08-28
JPS5547109B2 JPS5547109B2 (https=) 1980-11-27

Family

ID=11501487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP731440A Expired JPS5547109B2 (https=) 1972-12-28 1972-12-28

Country Status (1)

Country Link
JP (1) JPS5547109B2 (https=)

Also Published As

Publication number Publication date
JPS5547109B2 (https=) 1980-11-27

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