JPS498999B1 - - Google Patents

Info

Publication number
JPS498999B1
JPS498999B1 JP40044507A JP4450765A JPS498999B1 JP S498999 B1 JPS498999 B1 JP S498999B1 JP 40044507 A JP40044507 A JP 40044507A JP 4450765 A JP4450765 A JP 4450765A JP S498999 B1 JPS498999 B1 JP S498999B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP40044507A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS498999B1 publication Critical patent/JPS498999B1/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP40044507A 1964-07-24 1965-07-24 Pending JPS498999B1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEST22453A DE1299498B (de) 1964-07-24 1964-07-24 Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten
US422170A 1970-01-20 1970-01-20

Publications (1)

Publication Number Publication Date
JPS498999B1 true JPS498999B1 (ja) 1974-03-01

Family

ID=25994259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40044507A Pending JPS498999B1 (ja) 1964-07-24 1965-07-24

Country Status (4)

Country Link
US (2) US3601575A (ja)
JP (1) JPS498999B1 (ja)
DE (1) DE1299498B (ja)
GB (1) GB1105115A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065197U (ja) * 1983-10-13 1985-05-09 荒木　作男 潜水用器具

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU61048A1 (ja) * 1970-06-02 1971-08-13
US3835327A (en) * 1972-05-08 1974-09-10 United Aircraft Corp Triode electron gun for electron beam machines
JPS5674382A (en) * 1979-11-19 1981-06-19 Hitachi Ltd Electron beam welding device
DE3240653A1 (de) * 1982-11-04 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zur kontrolle von mittels elektronenstrahlgravierten druckformoberflaechen
US4570070A (en) * 1984-06-12 1986-02-11 Fuji Photo Film Co., Ltd. Ion-beam monitor
DE3442207A1 (de) * 1984-11-19 1986-05-28 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahl-istpositionsgeber
DE3538857A1 (de) * 1985-11-02 1987-05-07 Leybold Heraeus Gmbh & Co Kg Einrichtung fuer die eingabe eines sollwerts fuer den auftreffpunkt eines elektronenstrahls auf ein medium
DE3732880C1 (de) * 1987-09-30 1988-12-08 Leybold Ag Verfahren zum Nachfuehren eines Elektronenstrahls entlang der Stossfuge zweier zu verschweissender Werkstuecke beim Elektronenstrahlschweissen
DE3902274C2 (de) * 1989-01-26 1994-03-17 Leybold Ag Einrichtung zum Erkennen der Auftreffstelle eines Ladungsträgerstrahls auf einem Target
JP3830591B2 (ja) * 1996-11-05 2006-10-04 株式会社小松製作所 レーザ装置
EP3479933A1 (en) 2009-09-17 2019-05-08 Sciaky Inc. Electron beam layer manufacturing apparatus
AU2011233678B2 (en) 2010-03-31 2015-01-22 Sciaky, Inc. Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control
US10048043B2 (en) 2016-07-12 2018-08-14 Paul Rahmanian Target carrier with virtual targets
UA113607C2 (xx) * 2016-10-31 2017-02-10 Електронно-променевий прожектор з лінійним термокатодом

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE692336C (de) * 1934-12-07 1940-06-18 Bodo V Borries Dr Ing Verfahren zur Abbildung von Flaechen mittels Korpuskularstrahlen
GB511204A (en) * 1937-02-18 1939-08-15 Manfred Von Ardenne Improvements in electron microscopes
BE436010A (ja) * 1938-08-18 1900-01-01
US2561988A (en) * 1949-06-30 1951-07-24 Westinghouse Electric Corp Electron diffraction detector system
DE1014245B (de) * 1951-07-13 1957-08-22 Leitz Ernst Gmbh Verfahren und Vorrichtung zum Abbilden von elektrischen Potentialfeldern
US2901627A (en) * 1953-02-19 1959-08-25 Leitz Ernst Gmbh Method of and apparatus for the electronic magnification of objects
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
DE1133841B (de) * 1957-09-11 1962-07-26 Leitz Ernst Gmbh Elektronenmikroskop zur direkten Abbildung von Oberflaechen durch Sekundaerelektronen, Verfahren zur Untersuchung von Nichtleitern oder Halbleitern und Anordnung zur Durchfuehrung des Verfahrens
US3049618A (en) * 1959-05-13 1962-08-14 Commissariat Energie Atomique Methods and devices for performing spectrum analysis, in particular in the far ultraviolet region
US3143651A (en) * 1961-02-23 1964-08-04 American Science & Eng Inc X-ray reflection collimator adapted to focus x-radiation directly on a detector
NL270945A (ja) * 1961-03-02
FR1308086A (fr) * 1961-07-10 1962-11-03 Formeur de faisceau d'électrons et appareils comportant un tel forment
FR1347111A (fr) * 1961-11-18 1963-12-27 Zeiss Carl Procédé et appareillage pour la focalisation automatique du faisceau de particules électrisées dans les instruments destinés au travail d'un matériau au moyen d'un faisceau de particules électrisées
NL294850A (ja) * 1962-07-05
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3196246A (en) * 1962-11-29 1965-07-20 Rca Corp Means for observing a workpiece in electron beam machining apparatus
FR1353054A (fr) * 1963-01-12 1964-02-21 Alsacienne D Electronique Et D Procédé de soudage par bombardement électronique
DE1225775B (de) * 1963-03-23 1966-09-29 United Aircraft Corp Verfahren und Einrichtung zur Bearbeitung eines Werkstueckes mittels eines Ladungstraegerstrahles
US3221133A (en) * 1963-04-02 1965-11-30 Japan Electron Optics Lab Co L Electron microscope with means for treating and observing specimens
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065197U (ja) * 1983-10-13 1985-05-09 荒木　作男 潜水用器具

Also Published As

Publication number Publication date
US3601577A (en) 1971-08-24
DE1299498B (de) 1969-07-17
US3601575A (en) 1971-08-24
GB1105115A (en) 1968-03-06

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