JPS4988481A - - Google Patents
Info
- Publication number
- JPS4988481A JPS4988481A JP79573A JP79573A JPS4988481A JP S4988481 A JPS4988481 A JP S4988481A JP 79573 A JP79573 A JP 79573A JP 79573 A JP79573 A JP 79573A JP S4988481 A JPS4988481 A JP S4988481A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP79573A JPS5532018B2 (en, 2012) | 1972-12-25 | 1972-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP79573A JPS5532018B2 (en, 2012) | 1972-12-25 | 1972-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4988481A true JPS4988481A (en, 2012) | 1974-08-23 |
| JPS5532018B2 JPS5532018B2 (en, 2012) | 1980-08-22 |
Family
ID=11483602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP79573A Expired JPS5532018B2 (en, 2012) | 1972-12-25 | 1972-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5532018B2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0860383A (ja) * | 1994-08-23 | 1996-03-05 | Agency Of Ind Science & Technol | 局所エッチング方法及び装置 |
-
1972
- 1972-12-25 JP JP79573A patent/JPS5532018B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0860383A (ja) * | 1994-08-23 | 1996-03-05 | Agency Of Ind Science & Technol | 局所エッチング方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5532018B2 (en, 2012) | 1980-08-22 |