JPS4988481A - - Google Patents

Info

Publication number
JPS4988481A
JPS4988481A JP79573A JP79573A JPS4988481A JP S4988481 A JPS4988481 A JP S4988481A JP 79573 A JP79573 A JP 79573A JP 79573 A JP79573 A JP 79573A JP S4988481 A JPS4988481 A JP S4988481A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP79573A
Other languages
Japanese (ja)
Other versions
JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP79573A priority Critical patent/JPS5532018B2/ja
Publication of JPS4988481A publication Critical patent/JPS4988481A/ja
Publication of JPS5532018B2 publication Critical patent/JPS5532018B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP79573A 1972-12-25 1972-12-25 Expired JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP79573A JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-25 1972-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP79573A JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-25 1972-12-25

Publications (2)

Publication Number Publication Date
JPS4988481A true JPS4988481A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-23
JPS5532018B2 JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-08-22

Family

ID=11483602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP79573A Expired JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-12-25 1972-12-25

Country Status (1)

Country Link
JP (1) JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0860383A (ja) * 1994-08-23 1996-03-05 Agency Of Ind Science & Technol 局所エッチング方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0860383A (ja) * 1994-08-23 1996-03-05 Agency Of Ind Science & Technol 局所エッチング方法及び装置

Also Published As

Publication number Publication date
JPS5532018B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-08-22

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