JPS4988076A - - Google Patents

Info

Publication number
JPS4988076A
JPS4988076A JP47130072A JP13007272A JPS4988076A JP S4988076 A JPS4988076 A JP S4988076A JP 47130072 A JP47130072 A JP 47130072A JP 13007272 A JP13007272 A JP 13007272A JP S4988076 A JPS4988076 A JP S4988076A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47130072A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47130072A priority Critical patent/JPS4988076A/ja
Priority to US320706A priority patent/US3869367A/en
Publication of JPS4988076A publication Critical patent/JPS4988076A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP47130072A 1972-12-27 1972-12-27 Pending JPS4988076A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47130072A JPS4988076A (ja) 1972-12-27 1972-12-27
US320706A US3869367A (en) 1972-12-27 1973-01-03 Process for manufacturing a conductive film for a thin film integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47130072A JPS4988076A (ja) 1972-12-27 1972-12-27

Publications (1)

Publication Number Publication Date
JPS4988076A true JPS4988076A (ja) 1974-08-22

Family

ID=15025314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47130072A Pending JPS4988076A (ja) 1972-12-27 1972-12-27

Country Status (2)

Country Link
US (1) US3869367A (ja)
JP (1) JPS4988076A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766601A (en) * 1980-10-09 1982-04-22 Ricoh Kk Resistance unit and method of producing same
JPS6045008A (ja) * 1983-08-22 1985-03-11 松下電器産業株式会社 薄膜コンデンサの製造方法
US5685968A (en) * 1994-10-14 1997-11-11 Ngk Spark Plug Co., Ltd. Ceramic substrate with thin-film capacitor and method of producing the same

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969197A (en) * 1974-02-08 1976-07-13 Texas Instruments Incorporated Method for fabricating a thin film capacitor
US4894316A (en) * 1988-06-22 1990-01-16 Electro-Films, Inc. Adjustment of thin film capacitors
KR970009491B1 (ko) * 1989-11-30 1997-06-13 가부시끼가이샤 도시바 배선재료와 이를 이용한 전자장치 및 액정표시장치
US5281554A (en) * 1991-02-08 1994-01-25 Sharp Kabushiki Kaisha Method for producing a semiconductor device having a tantalum thin film
US9059074B2 (en) * 2008-03-26 2015-06-16 Stats Chippac Ltd. Integrated circuit package system with planar interconnect
US8808522B2 (en) * 2011-09-07 2014-08-19 National Chung Hsing University Method for forming oxide film by plasma electrolytic oxidation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
NL238401A (ja) * 1958-06-16
US3641402A (en) * 1969-12-30 1972-02-08 Ibm Semiconductor device with beta tantalum-gold composite conductor metallurgy

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766601A (en) * 1980-10-09 1982-04-22 Ricoh Kk Resistance unit and method of producing same
JPS6231801B2 (ja) * 1980-10-09 1987-07-10 Ricoh Kk
JPS6045008A (ja) * 1983-08-22 1985-03-11 松下電器産業株式会社 薄膜コンデンサの製造方法
US5685968A (en) * 1994-10-14 1997-11-11 Ngk Spark Plug Co., Ltd. Ceramic substrate with thin-film capacitor and method of producing the same

Also Published As

Publication number Publication date
US3869367A (en) 1975-03-04

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