JPS4986895A - - Google Patents

Info

Publication number
JPS4986895A
JPS4986895A JP48130862A JP13086273A JPS4986895A JP S4986895 A JPS4986895 A JP S4986895A JP 48130862 A JP48130862 A JP 48130862A JP 13086273 A JP13086273 A JP 13086273A JP S4986895 A JPS4986895 A JP S4986895A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48130862A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4986895A publication Critical patent/JPS4986895A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/126—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing rare earth metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Hard Magnetic Materials (AREA)
  • Physical Vapour Deposition (AREA)
JP48130862A 1972-12-04 1973-11-22 Pending JPS4986895A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00311879A US3856579A (en) 1972-12-04 1972-12-04 Sputtered magnetic materials comprising rare-earth metals and method of preparation

Publications (1)

Publication Number Publication Date
JPS4986895A true JPS4986895A (en) 1974-08-20

Family

ID=23208919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48130862A Pending JPS4986895A (en) 1972-12-04 1973-11-22

Country Status (2)

Country Link
US (1) US3856579A (en)
JP (1) JPS4986895A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174605A (en) * 1974-12-24 1976-06-28 Suwa Seikosha Kk JIKIKIRO KUTAI
JPH01119008A (en) * 1987-10-30 1989-05-11 Yaskawa Electric Mfg Co Ltd Formation of ferromagnetic thin film

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038171A (en) * 1976-03-31 1977-07-26 Battelle Memorial Institute Supported plasma sputtering apparatus for high deposition rate over large area
JPS5775414A (en) * 1980-10-28 1982-05-12 Fuji Photo Film Co Ltd Manufacture of magneti substance thin film target for sputtering
JPS57100627A (en) * 1980-12-12 1982-06-22 Teijin Ltd Manufacture of vertical magnetic recording medium
JPS57143728A (en) * 1981-02-27 1982-09-06 Fuji Photo Film Co Ltd Magnetic recording medium
JPS57143729A (en) * 1981-02-27 1982-09-06 Fuji Photo Film Co Ltd Magnetic recording medium
JPS57143727A (en) * 1981-02-27 1982-09-06 Fuji Photo Film Co Ltd Magnetic recording medium
US4684454A (en) * 1983-05-17 1987-08-04 Minnesota Mining And Manufacturing Company Sputtering process for making magneto optic alloy
US4620872A (en) * 1984-10-18 1986-11-04 Mitsubishi Kinzoku Kabushiki Kaisha Composite target material and process for producing the same
US4897283A (en) * 1985-12-20 1990-01-30 The Charles Stark Draper Laboratory, Inc. Process of producing aligned permanent magnets
GB8605878D0 (en) * 1986-03-10 1986-04-16 Johnson Matthey Plc Casting transition metal alloy
US4715891A (en) * 1986-10-17 1987-12-29 Ovonic Synthetic Materials Company, Inc. Method of preparing a magnetic material
US4822675A (en) * 1987-01-14 1989-04-18 Minnesota Mining And Manufacturing Company Stable magneto optic recording medium
US4950556A (en) * 1987-10-26 1990-08-21 Minnesota Mining And Manufacturing Company Magneto-optic recording medium
JP2673807B2 (en) * 1987-10-30 1997-11-05 パイオニア株式会社 Method for manufacturing magneto-optical recording medium
US5439500A (en) * 1993-12-02 1995-08-08 Materials Research Corporation Magneto-optical alloy sputter targets
JP5688468B2 (en) * 2011-09-22 2015-03-25 学校法人 芝浦工業大学 THIN FILM FORMING METHOD, THIN FILM FORMING APPARATUS AND PROCESSED FORM, DIE AND TOOL FORMED
CN105755441B (en) * 2016-04-20 2019-01-11 中国科学院宁波材料技术与工程研究所 A kind of method that magnetron sputtering method expands infiltration heavy rare earth raising coercivity of sintered ndfeb

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615911A (en) * 1969-05-16 1971-10-26 Bell Telephone Labor Inc Sputtered magnetic films

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303117A (en) * 1964-12-23 1967-02-07 Ibm Process for cathodically sputtering a ferromagnetic thin film of a nickeliron-molybdenum alloy
NL6608335A (en) * 1966-06-16 1967-12-18
US3629118A (en) * 1969-05-05 1971-12-21 Morris D Isserlis Ferrite powder and method of preparing it
JPS4941012B1 (en) * 1970-06-11 1974-11-06
US3684593A (en) * 1970-11-02 1972-08-15 Gen Electric Heat-aged sintered cobalt-rare earth intermetallic product and process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615911A (en) * 1969-05-16 1971-10-26 Bell Telephone Labor Inc Sputtered magnetic films

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174605A (en) * 1974-12-24 1976-06-28 Suwa Seikosha Kk JIKIKIRO KUTAI
JPH01119008A (en) * 1987-10-30 1989-05-11 Yaskawa Electric Mfg Co Ltd Formation of ferromagnetic thin film

Also Published As

Publication number Publication date
US3856579A (en) 1974-12-24

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