JPS4986770U - - Google Patents

Info

Publication number
JPS4986770U
JPS4986770U JP13258672U JP13258672U JPS4986770U JP S4986770 U JPS4986770 U JP S4986770U JP 13258672 U JP13258672 U JP 13258672U JP 13258672 U JP13258672 U JP 13258672U JP S4986770 U JPS4986770 U JP S4986770U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13258672U
Other languages
Japanese (ja)
Other versions
JPS5318261Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13258672U priority Critical patent/JPS5318261Y2/ja
Publication of JPS4986770U publication Critical patent/JPS4986770U/ja
Application granted granted Critical
Publication of JPS5318261Y2 publication Critical patent/JPS5318261Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13258672U 1972-11-17 1972-11-17 Expired JPS5318261Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13258672U JPS5318261Y2 (en:Method) 1972-11-17 1972-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13258672U JPS5318261Y2 (en:Method) 1972-11-17 1972-11-17

Publications (2)

Publication Number Publication Date
JPS4986770U true JPS4986770U (en:Method) 1974-07-26
JPS5318261Y2 JPS5318261Y2 (en:Method) 1978-05-16

Family

ID=28396052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13258672U Expired JPS5318261Y2 (en:Method) 1972-11-17 1972-11-17

Country Status (1)

Country Link
JP (1) JPS5318261Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5318261Y2 (en:Method) 1978-05-16

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