JPS498675A - - Google Patents
Info
- Publication number
- JPS498675A JPS498675A JP5315272A JP5315272A JPS498675A JP S498675 A JPS498675 A JP S498675A JP 5315272 A JP5315272 A JP 5315272A JP 5315272 A JP5315272 A JP 5315272A JP S498675 A JPS498675 A JP S498675A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Control Of Velocity Or Acceleration (AREA)
- Servomotors (AREA)
- Fluid-Pressure Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315272A JPS5311628B2 (jp) | 1972-05-29 | 1972-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315272A JPS5311628B2 (jp) | 1972-05-29 | 1972-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS498675A true JPS498675A (jp) | 1974-01-25 |
| JPS5311628B2 JPS5311628B2 (jp) | 1978-04-22 |
Family
ID=12934849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5315272A Expired JPS5311628B2 (jp) | 1972-05-29 | 1972-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311628B2 (jp) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50109083U (jp) * | 1974-02-15 | 1975-09-06 | ||
| JPS5110291A (en) * | 1974-07-16 | 1976-01-27 | Komatsu Mfg Co Ltd | Kensetsusharyono sagyokino jidoseigyosochi |
| JPS5114593A (en) * | 1974-07-24 | 1976-02-05 | Komatsu Mfg Co Ltd | Kensetsusharyono shiagebetsujidoseigyosochi |
| JPS5121798U (jp) * | 1974-08-06 | 1976-02-17 | ||
| JPS5124479A (en) * | 1974-08-23 | 1976-02-27 | Komatsu Mfg Co Ltd | Shirinda nyoru ichigime hohooyobi sochi |
| JPS5153385U (jp) * | 1974-10-22 | 1976-04-23 | ||
| JPS51111592A (en) * | 1975-03-28 | 1976-10-01 | Hitachi Ltd | Stop position controlling system of fluid-pressure actuator |
| JPS5279195A (en) * | 1975-12-26 | 1977-07-04 | Mitsubishi Motors Corp | Piston positional shift regulating controller |
| JPS5364894U (jp) * | 1976-10-29 | 1978-05-31 | ||
| JPS621001A (ja) * | 1985-06-26 | 1987-01-07 | Kubota Ltd | 作業機の作業装置用駆動制御機構 |
| WO2020059427A1 (ja) * | 2018-09-19 | 2020-03-26 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置及び蓋開閉機構及び半導体装置の製造方法及び流体圧駆動システム |
-
1972
- 1972-05-29 JP JP5315272A patent/JPS5311628B2/ja not_active Expired
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50109083U (jp) * | 1974-02-15 | 1975-09-06 | ||
| JPS5110291A (en) * | 1974-07-16 | 1976-01-27 | Komatsu Mfg Co Ltd | Kensetsusharyono sagyokino jidoseigyosochi |
| JPS6018841B2 (ja) * | 1974-07-16 | 1985-05-13 | 株式会社小松製作所 | 建設車輌の作業機の自動制御装置 |
| JPS5114593A (en) * | 1974-07-24 | 1976-02-05 | Komatsu Mfg Co Ltd | Kensetsusharyono shiagebetsujidoseigyosochi |
| JPS5518561Y2 (jp) * | 1974-08-06 | 1980-04-30 | ||
| JPS5121798U (jp) * | 1974-08-06 | 1976-02-17 | ||
| JPS5124479A (en) * | 1974-08-23 | 1976-02-27 | Komatsu Mfg Co Ltd | Shirinda nyoru ichigime hohooyobi sochi |
| JPS5153385U (jp) * | 1974-10-22 | 1976-04-23 | ||
| JPS51111592A (en) * | 1975-03-28 | 1976-10-01 | Hitachi Ltd | Stop position controlling system of fluid-pressure actuator |
| JPS5279195A (en) * | 1975-12-26 | 1977-07-04 | Mitsubishi Motors Corp | Piston positional shift regulating controller |
| JPS5364894U (jp) * | 1976-10-29 | 1978-05-31 | ||
| JPS616327Y2 (jp) * | 1976-10-29 | 1986-02-26 | ||
| JPS621001A (ja) * | 1985-06-26 | 1987-01-07 | Kubota Ltd | 作業機の作業装置用駆動制御機構 |
| WO2020059427A1 (ja) * | 2018-09-19 | 2020-03-26 | 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ | 基板処理装置及び蓋開閉機構及び半導体装置の製造方法及び流体圧駆動システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5311628B2 (jp) | 1978-04-22 |