JPS4986219A - - Google Patents
Info
- Publication number
- JPS4986219A JPS4986219A JP12865172A JP12865172A JPS4986219A JP S4986219 A JPS4986219 A JP S4986219A JP 12865172 A JP12865172 A JP 12865172A JP 12865172 A JP12865172 A JP 12865172A JP S4986219 A JPS4986219 A JP S4986219A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12865172A JPS4986219A (en) | 1972-12-21 | 1972-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12865172A JPS4986219A (en) | 1972-12-21 | 1972-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4986219A true JPS4986219A (en) | 1974-08-19 |
Family
ID=14990066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12865172A Pending JPS4986219A (en) | 1972-12-21 | 1972-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4986219A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005336045A (en) * | 2004-04-30 | 2005-12-08 | Mitsubishi Materials Polycrystalline Silicon Corp | Method of manufacturing polycrystalline silicon |
-
1972
- 1972-12-21 JP JP12865172A patent/JPS4986219A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005336045A (en) * | 2004-04-30 | 2005-12-08 | Mitsubishi Materials Polycrystalline Silicon Corp | Method of manufacturing polycrystalline silicon |