JPS4985980A - - Google Patents
Info
- Publication number
- JPS4985980A JPS4985980A JP12785272A JP12785272A JPS4985980A JP S4985980 A JPS4985980 A JP S4985980A JP 12785272 A JP12785272 A JP 12785272A JP 12785272 A JP12785272 A JP 12785272A JP S4985980 A JPS4985980 A JP S4985980A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12785272A JPS5147591B2 (en:Method) | 1972-12-19 | 1972-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12785272A JPS5147591B2 (en:Method) | 1972-12-19 | 1972-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4985980A true JPS4985980A (en:Method) | 1974-08-17 |
| JPS5147591B2 JPS5147591B2 (en:Method) | 1976-12-15 |
Family
ID=14970247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12785272A Expired JPS5147591B2 (en:Method) | 1972-12-19 | 1972-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147591B2 (en:Method) |
-
1972
- 1972-12-19 JP JP12785272A patent/JPS5147591B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5147591B2 (en:Method) | 1976-12-15 |