JPS4984970A - - Google Patents
Info
- Publication number
- JPS4984970A JPS4984970A JP12769772A JP12769772A JPS4984970A JP S4984970 A JPS4984970 A JP S4984970A JP 12769772 A JP12769772 A JP 12769772A JP 12769772 A JP12769772 A JP 12769772A JP S4984970 A JPS4984970 A JP S4984970A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12769772A JPS521716B2 (pl) | 1972-12-21 | 1972-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12769772A JPS521716B2 (pl) | 1972-12-21 | 1972-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4984970A true JPS4984970A (pl) | 1974-08-15 |
| JPS521716B2 JPS521716B2 (pl) | 1977-01-17 |
Family
ID=14966452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12769772A Expired JPS521716B2 (pl) | 1972-12-21 | 1972-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS521716B2 (pl) |
-
1972
- 1972-12-21 JP JP12769772A patent/JPS521716B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS521716B2 (pl) | 1977-01-17 |