JPS4984787A - - Google Patents
Info
- Publication number
- JPS4984787A JPS4984787A JP12845572A JP12845572A JPS4984787A JP S4984787 A JPS4984787 A JP S4984787A JP 12845572 A JP12845572 A JP 12845572A JP 12845572 A JP12845572 A JP 12845572A JP S4984787 A JPS4984787 A JP S4984787A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845572A JPS4984787A (fr) | 1972-12-21 | 1972-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12845572A JPS4984787A (fr) | 1972-12-21 | 1972-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4984787A true JPS4984787A (fr) | 1974-08-14 |
Family
ID=14985119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12845572A Pending JPS4984787A (fr) | 1972-12-21 | 1972-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4984787A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63138741A (ja) * | 1986-12-01 | 1988-06-10 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体基板のアニ−ル装置 |
-
1972
- 1972-12-21 JP JP12845572A patent/JPS4984787A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63138741A (ja) * | 1986-12-01 | 1988-06-10 | Nippon Telegr & Teleph Corp <Ntt> | 化合物半導体基板のアニ−ル装置 |