JPS4984461A - - Google Patents
Info
- Publication number
- JPS4984461A JPS4984461A JP12742472A JP12742472A JPS4984461A JP S4984461 A JPS4984461 A JP S4984461A JP 12742472 A JP12742472 A JP 12742472A JP 12742472 A JP12742472 A JP 12742472A JP S4984461 A JPS4984461 A JP S4984461A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12742472A JPS4984461A (cs) | 1972-12-18 | 1972-12-18 | |
| US372694A US3869211A (en) | 1972-06-29 | 1973-06-22 | Instrument for measuring thickness of thin film |
| DE2333326A DE2333326C3 (de) | 1972-06-29 | 1973-06-29 | Einrichtung zum Messen der Dicke eines auf einer Unterlage abgelagerten dünnen Films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12742472A JPS4984461A (cs) | 1972-12-18 | 1972-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4984461A true JPS4984461A (cs) | 1974-08-14 |
Family
ID=14959602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12742472A Pending JPS4984461A (cs) | 1972-06-29 | 1972-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4984461A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03237304A (ja) * | 1990-02-14 | 1991-10-23 | Anelva Corp | 薄膜作製装置 |
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1972
- 1972-12-18 JP JP12742472A patent/JPS4984461A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03237304A (ja) * | 1990-02-14 | 1991-10-23 | Anelva Corp | 薄膜作製装置 |