JPS4984189A - - Google Patents

Info

Publication number
JPS4984189A
JPS4984189A JP12528872A JP12528872A JPS4984189A JP S4984189 A JPS4984189 A JP S4984189A JP 12528872 A JP12528872 A JP 12528872A JP 12528872 A JP12528872 A JP 12528872A JP S4984189 A JPS4984189 A JP S4984189A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12528872A
Other languages
Japanese (ja)
Other versions
JPS5237949B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12528872A priority Critical patent/JPS5237949B2/ja
Publication of JPS4984189A publication Critical patent/JPS4984189A/ja
Publication of JPS5237949B2 publication Critical patent/JPS5237949B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP12528872A 1972-12-15 1972-12-15 Expired JPS5237949B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (en) 1972-12-15 1972-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12528872A JPS5237949B2 (en) 1972-12-15 1972-12-15

Publications (2)

Publication Number Publication Date
JPS4984189A true JPS4984189A (en) 1974-08-13
JPS5237949B2 JPS5237949B2 (en) 1977-09-26

Family

ID=14906353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12528872A Expired JPS5237949B2 (en) 1972-12-15 1972-12-15

Country Status (1)

Country Link
JP (1) JPS5237949B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577178A (en) * 1978-12-06 1980-06-10 Toshiba Corp Semiconductor pressure converting element
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548956U (en) * 1977-06-21 1979-01-20

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5577178A (en) * 1978-12-06 1980-06-10 Toshiba Corp Semiconductor pressure converting element
JPS6313357B2 (en) * 1978-12-06 1988-03-25 Tokyo Shibaura Electric Co
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor
JPH0154870B2 (en) * 1979-10-30 1989-11-21 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS5237949B2 (en) 1977-09-26

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