JPS4984189A - - Google Patents
Info
- Publication number
- JPS4984189A JPS4984189A JP12528872A JP12528872A JPS4984189A JP S4984189 A JPS4984189 A JP S4984189A JP 12528872 A JP12528872 A JP 12528872A JP 12528872 A JP12528872 A JP 12528872A JP S4984189 A JPS4984189 A JP S4984189A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12528872A JPS5237949B2 (de) | 1972-12-15 | 1972-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12528872A JPS5237949B2 (de) | 1972-12-15 | 1972-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4984189A true JPS4984189A (de) | 1974-08-13 |
| JPS5237949B2 JPS5237949B2 (de) | 1977-09-26 |
Family
ID=14906353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12528872A Expired JPS5237949B2 (de) | 1972-12-15 | 1972-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5237949B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5577178A (en) * | 1978-12-06 | 1980-06-10 | Toshiba Corp | Semiconductor pressure converting element |
| JPS5664471A (en) * | 1979-10-30 | 1981-06-01 | Toshiba Corp | Detector for pressure of semiconductor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS548956U (de) * | 1977-06-21 | 1979-01-20 |
-
1972
- 1972-12-15 JP JP12528872A patent/JPS5237949B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5577178A (en) * | 1978-12-06 | 1980-06-10 | Toshiba Corp | Semiconductor pressure converting element |
| JPS6313357B2 (de) * | 1978-12-06 | 1988-03-25 | Tokyo Shibaura Electric Co | |
| JPS5664471A (en) * | 1979-10-30 | 1981-06-01 | Toshiba Corp | Detector for pressure of semiconductor |
| JPH0154870B2 (de) * | 1979-10-30 | 1989-11-21 | Tokyo Shibaura Electric Co |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5237949B2 (de) | 1977-09-26 |