JPS4983874A - - Google Patents

Info

Publication number
JPS4983874A
JPS4983874A JP12722172A JP12722172A JPS4983874A JP S4983874 A JPS4983874 A JP S4983874A JP 12722172 A JP12722172 A JP 12722172A JP 12722172 A JP12722172 A JP 12722172A JP S4983874 A JPS4983874 A JP S4983874A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12722172A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12722172A priority Critical patent/JPS4983874A/ja
Publication of JPS4983874A publication Critical patent/JPS4983874A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
  • Arc-Extinguishing Devices That Are Switches (AREA)
JP12722172A 1972-12-20 1972-12-20 Pending JPS4983874A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12722172A JPS4983874A (ko) 1972-12-20 1972-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12722172A JPS4983874A (ko) 1972-12-20 1972-12-20

Publications (1)

Publication Number Publication Date
JPS4983874A true JPS4983874A (ko) 1974-08-12

Family

ID=14954707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12722172A Pending JPS4983874A (ko) 1972-12-20 1972-12-20

Country Status (1)

Country Link
JP (1) JPS4983874A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006132318A1 (ja) * 2005-06-10 2006-12-14 Tokyo Electron Limited 弁体、バルブ、切替えバルブおよびトラップ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006132318A1 (ja) * 2005-06-10 2006-12-14 Tokyo Electron Limited 弁体、バルブ、切替えバルブおよびトラップ装置

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