JPS4983764A - - Google Patents

Info

Publication number
JPS4983764A
JPS4983764A JP12525272A JP12525272A JPS4983764A JP S4983764 A JPS4983764 A JP S4983764A JP 12525272 A JP12525272 A JP 12525272A JP 12525272 A JP12525272 A JP 12525272A JP S4983764 A JPS4983764 A JP S4983764A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12525272A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12525272A priority Critical patent/JPS4983764A/ja
Publication of JPS4983764A publication Critical patent/JPS4983764A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Drying Of Semiconductors (AREA)
JP12525272A 1972-12-15 1972-12-15 Pending JPS4983764A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12525272A JPS4983764A (enrdf_load_stackoverflow) 1972-12-15 1972-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12525272A JPS4983764A (enrdf_load_stackoverflow) 1972-12-15 1972-12-15

Publications (1)

Publication Number Publication Date
JPS4983764A true JPS4983764A (enrdf_load_stackoverflow) 1974-08-12

Family

ID=14905505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12525272A Pending JPS4983764A (enrdf_load_stackoverflow) 1972-12-15 1972-12-15

Country Status (1)

Country Link
JP (1) JPS4983764A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630729A (en) * 1979-08-22 1981-03-27 Yokogawa Hokushin Electric Corp Formation of thin film pattern
JPS58125830A (ja) * 1982-01-22 1983-07-27 Fujitsu Ltd プラズマエツチング方法
JPS58186937A (ja) * 1982-04-26 1983-11-01 Hitachi Ltd ドライエツチング方法
JPS5947733A (ja) * 1982-09-13 1984-03-17 Hitachi Ltd プラズマプロセス方法および装置
JPH02164441A (ja) * 1988-12-19 1990-06-25 Teru Kyushu Kk オゾン発生方法およびこれを用いたアッシング方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630729A (en) * 1979-08-22 1981-03-27 Yokogawa Hokushin Electric Corp Formation of thin film pattern
JPS58125830A (ja) * 1982-01-22 1983-07-27 Fujitsu Ltd プラズマエツチング方法
JPS58186937A (ja) * 1982-04-26 1983-11-01 Hitachi Ltd ドライエツチング方法
JPS5947733A (ja) * 1982-09-13 1984-03-17 Hitachi Ltd プラズマプロセス方法および装置
JPH02164441A (ja) * 1988-12-19 1990-06-25 Teru Kyushu Kk オゾン発生方法およびこれを用いたアッシング方法

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