JPS4983764A - - Google Patents
Info
- Publication number
- JPS4983764A JPS4983764A JP12525272A JP12525272A JPS4983764A JP S4983764 A JPS4983764 A JP S4983764A JP 12525272 A JP12525272 A JP 12525272A JP 12525272 A JP12525272 A JP 12525272A JP S4983764 A JPS4983764 A JP S4983764A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525272A JPS4983764A (cs) | 1972-12-15 | 1972-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12525272A JPS4983764A (cs) | 1972-12-15 | 1972-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4983764A true JPS4983764A (cs) | 1974-08-12 |
Family
ID=14905505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12525272A Pending JPS4983764A (cs) | 1972-12-15 | 1972-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4983764A (cs) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630729A (en) * | 1979-08-22 | 1981-03-27 | Yokogawa Hokushin Electric Corp | Formation of thin film pattern |
| JPS58125830A (ja) * | 1982-01-22 | 1983-07-27 | Fujitsu Ltd | プラズマエツチング方法 |
| JPS58186937A (ja) * | 1982-04-26 | 1983-11-01 | Hitachi Ltd | ドライエツチング方法 |
| JPS5947733A (ja) * | 1982-09-13 | 1984-03-17 | Hitachi Ltd | プラズマプロセス方法および装置 |
| JPH02164441A (ja) * | 1988-12-19 | 1990-06-25 | Teru Kyushu Kk | オゾン発生方法およびこれを用いたアッシング方法 |
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1972
- 1972-12-15 JP JP12525272A patent/JPS4983764A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630729A (en) * | 1979-08-22 | 1981-03-27 | Yokogawa Hokushin Electric Corp | Formation of thin film pattern |
| JPS58125830A (ja) * | 1982-01-22 | 1983-07-27 | Fujitsu Ltd | プラズマエツチング方法 |
| JPS58186937A (ja) * | 1982-04-26 | 1983-11-01 | Hitachi Ltd | ドライエツチング方法 |
| JPS5947733A (ja) * | 1982-09-13 | 1984-03-17 | Hitachi Ltd | プラズマプロセス方法および装置 |
| JPH02164441A (ja) * | 1988-12-19 | 1990-06-25 | Teru Kyushu Kk | オゾン発生方法およびこれを用いたアッシング方法 |