JPS4983677A - - Google Patents
Info
- Publication number
- JPS4983677A JPS4983677A JP12625172A JP12625172A JPS4983677A JP S4983677 A JPS4983677 A JP S4983677A JP 12625172 A JP12625172 A JP 12625172A JP 12625172 A JP12625172 A JP 12625172A JP S4983677 A JPS4983677 A JP S4983677A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12625172A JPS513713B2 (cs) | 1972-12-18 | 1972-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12625172A JPS513713B2 (cs) | 1972-12-18 | 1972-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4983677A true JPS4983677A (cs) | 1974-08-12 |
| JPS513713B2 JPS513713B2 (cs) | 1976-02-05 |
Family
ID=14930534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12625172A Expired JPS513713B2 (cs) | 1972-12-18 | 1972-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS513713B2 (cs) |
-
1972
- 1972-12-18 JP JP12625172A patent/JPS513713B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS513713B2 (cs) | 1976-02-05 |