JPS4982274A - - Google Patents
Info
- Publication number
- JPS4982274A JPS4982274A JP12571172A JP12571172A JPS4982274A JP S4982274 A JPS4982274 A JP S4982274A JP 12571172 A JP12571172 A JP 12571172A JP 12571172 A JP12571172 A JP 12571172A JP S4982274 A JPS4982274 A JP S4982274A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12571172A JPS4982274A (ja) | 1972-12-12 | 1972-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12571172A JPS4982274A (ja) | 1972-12-12 | 1972-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4982274A true JPS4982274A (ja) | 1974-08-08 |
Family
ID=14916836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12571172A Pending JPS4982274A (ja) | 1972-12-12 | 1972-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4982274A (ja) |
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1972
- 1972-12-12 JP JP12571172A patent/JPS4982274A/ja active Pending