JPS498179A - - Google Patents

Info

Publication number
JPS498179A
JPS498179A JP4552072A JP4552072A JPS498179A JP S498179 A JPS498179 A JP S498179A JP 4552072 A JP4552072 A JP 4552072A JP 4552072 A JP4552072 A JP 4552072A JP S498179 A JPS498179 A JP S498179A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4552072A
Other languages
Japanese (ja)
Other versions
JPS5626978B2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4552072A priority Critical patent/JPS5626978B2/ja
Publication of JPS498179A publication Critical patent/JPS498179A/ja
Publication of JPS5626978B2 publication Critical patent/JPS5626978B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
JP4552072A 1972-05-10 1972-05-10 Expired JPS5626978B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4552072A JPS5626978B2 (zh) 1972-05-10 1972-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4552072A JPS5626978B2 (zh) 1972-05-10 1972-05-10

Publications (2)

Publication Number Publication Date
JPS498179A true JPS498179A (zh) 1974-01-24
JPS5626978B2 JPS5626978B2 (zh) 1981-06-22

Family

ID=12721678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4552072A Expired JPS5626978B2 (zh) 1972-05-10 1972-05-10

Country Status (1)

Country Link
JP (1) JPS5626978B2 (zh)

Also Published As

Publication number Publication date
JPS5626978B2 (zh) 1981-06-22

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