JPS4981286A - - Google Patents
Info
- Publication number
- JPS4981286A JPS4981286A JP12494272A JP12494272A JPS4981286A JP S4981286 A JPS4981286 A JP S4981286A JP 12494272 A JP12494272 A JP 12494272A JP 12494272 A JP12494272 A JP 12494272A JP S4981286 A JPS4981286 A JP S4981286A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12494272A JPS4981286A (hu) | 1972-12-13 | 1972-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12494272A JPS4981286A (hu) | 1972-12-13 | 1972-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4981286A true JPS4981286A (hu) | 1974-08-06 |
Family
ID=14897991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12494272A Pending JPS4981286A (hu) | 1972-12-13 | 1972-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4981286A (hu) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5353800A (en) * | 1976-10-26 | 1978-05-16 | Nippon Telegr & Teleph Corp <Ntt> | Sputtering process |
-
1972
- 1972-12-13 JP JP12494272A patent/JPS4981286A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5353800A (en) * | 1976-10-26 | 1978-05-16 | Nippon Telegr & Teleph Corp <Ntt> | Sputtering process |