JPS4980977A - - Google Patents
Info
- Publication number
- JPS4980977A JPS4980977A JP47118429A JP11842972A JPS4980977A JP S4980977 A JPS4980977 A JP S4980977A JP 47118429 A JP47118429 A JP 47118429A JP 11842972 A JP11842972 A JP 11842972A JP S4980977 A JPS4980977 A JP S4980977A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11842972A JPS5542496B2 (en:Method) | 1972-11-24 | 1972-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11842972A JPS5542496B2 (en:Method) | 1972-11-24 | 1972-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4980977A true JPS4980977A (en:Method) | 1974-08-05 |
| JPS5542496B2 JPS5542496B2 (en:Method) | 1980-10-31 |
Family
ID=14736413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11842972A Expired JPS5542496B2 (en:Method) | 1972-11-24 | 1972-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5542496B2 (en:Method) |
-
1972
- 1972-11-24 JP JP11842972A patent/JPS5542496B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5542496B2 (en:Method) | 1980-10-31 |