JPS4980664U - - Google Patents

Info

Publication number
JPS4980664U
JPS4980664U JP12595272U JP12595272U JPS4980664U JP S4980664 U JPS4980664 U JP S4980664U JP 12595272 U JP12595272 U JP 12595272U JP 12595272 U JP12595272 U JP 12595272U JP S4980664 U JPS4980664 U JP S4980664U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12595272U
Other languages
Japanese (ja)
Other versions
JPS5347901Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12595272U priority Critical patent/JPS5347901Y2/ja
Publication of JPS4980664U publication Critical patent/JPS4980664U/ja
Application granted granted Critical
Publication of JPS5347901Y2 publication Critical patent/JPS5347901Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12595272U 1972-10-31 1972-10-31 Expired JPS5347901Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12595272U JPS5347901Y2 (en:Method) 1972-10-31 1972-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12595272U JPS5347901Y2 (en:Method) 1972-10-31 1972-10-31

Publications (2)

Publication Number Publication Date
JPS4980664U true JPS4980664U (en:Method) 1974-07-12
JPS5347901Y2 JPS5347901Y2 (en:Method) 1978-11-16

Family

ID=28377309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12595272U Expired JPS5347901Y2 (en:Method) 1972-10-31 1972-10-31

Country Status (1)

Country Link
JP (1) JPS5347901Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5347901Y2 (en:Method) 1978-11-16

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