JPS4979976A - - Google Patents
Info
- Publication number
- JPS4979976A JPS4979976A JP12157772A JP12157772A JPS4979976A JP S4979976 A JPS4979976 A JP S4979976A JP 12157772 A JP12157772 A JP 12157772A JP 12157772 A JP12157772 A JP 12157772A JP S4979976 A JPS4979976 A JP S4979976A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12157772A JPS4979976A (show.php) | 1972-12-06 | 1972-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12157772A JPS4979976A (show.php) | 1972-12-06 | 1972-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979976A true JPS4979976A (show.php) | 1974-08-01 |
Family
ID=14814669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12157772A Pending JPS4979976A (show.php) | 1972-12-06 | 1972-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4979976A (show.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721930A (en) * | 1980-07-14 | 1982-02-04 | Mitsubishi Electric Corp | Chemical vapor phase growing apparatus |
-
1972
- 1972-12-06 JP JP12157772A patent/JPS4979976A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721930A (en) * | 1980-07-14 | 1982-02-04 | Mitsubishi Electric Corp | Chemical vapor phase growing apparatus |