JPS4979934A - - Google Patents

Info

Publication number
JPS4979934A
JPS4979934A JP12343772A JP12343772A JPS4979934A JP S4979934 A JPS4979934 A JP S4979934A JP 12343772 A JP12343772 A JP 12343772A JP 12343772 A JP12343772 A JP 12343772A JP S4979934 A JPS4979934 A JP S4979934A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12343772A
Other languages
Japanese (ja)
Other versions
JPS5125226B2 (show.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12343772A priority Critical patent/JPS5125226B2/ja
Publication of JPS4979934A publication Critical patent/JPS4979934A/ja
Publication of JPS5125226B2 publication Critical patent/JPS5125226B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP12343772A 1972-12-11 1972-12-11 Expired JPS5125226B2 (show.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12343772A JPS5125226B2 (show.php) 1972-12-11 1972-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12343772A JPS5125226B2 (show.php) 1972-12-11 1972-12-11

Publications (2)

Publication Number Publication Date
JPS4979934A true JPS4979934A (show.php) 1974-08-01
JPS5125226B2 JPS5125226B2 (show.php) 1976-07-29

Family

ID=14860545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12343772A Expired JPS5125226B2 (show.php) 1972-12-11 1972-12-11

Country Status (1)

Country Link
JP (1) JPS5125226B2 (show.php)

Also Published As

Publication number Publication date
JPS5125226B2 (show.php) 1976-07-29

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